MEMS actuator with long travel range

Abstract:

The present invention relates generally to micro electro-mechanical systems (MEMS) devices, and more particularly to MEMS actuators. The microelectromechanical system (MEMS) means a device in which mechanical elements, sensors, actuators, and electronics (electronic devices) are integrated on a common silicon substrate by microfabrication technology. For example, microelectronics are typically fabricated using an integrated circuit (IC) process, while micromechanical components use a micromachining process similar to that process to selectively select portions of a silicon wafer. It is produced by forming mechanical parts and electromechanical parts by etching away or adding new structural layers. MEMS devices are low-cost, can be batch-produced, and are compatible with standard microelectronics, so they can be used for spectroscopic measurement, shape measurement, environmental sensing, refractive index measurement (or material recognition), and other sensor applications An attractive candidate suitable for. Furthermore, since the MEMS device is small in size, the MEMS device can be integrated into a mobile device or a handheld device.