COMPENSATED MEMS FT-IR SPECTROMETER ARCHITECTURE

Abstract:

The present invention is directed to a Micro Electro-Mechanical System (MEMS) interferometer as defined in claim 1, that uses balancing interfaces to overcome the verticality and dispersion problems. The MEMS interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and the balancing interfaces.