Self-alignment MEMS device

Abstract:

The present invention relates generally to optical spectroscopy and optical interferometry, and more particularly to the use of micro electro-mechanical system (MEMS) technology in optical interferometers. A micro electro mechanical system (MEMS) refers to a device in which mechanical elements, sensors, actuators, and electronics are integrated on a common silicon substrate by micro processing technology. For example, microelectronics are typically fabricated using an integrated circuit (IC) process, while a compatible microfabrication process is used to selectively etch away portions of a silicon wafer or create new structures. Layers are added to form mechanical and electromechanical components to create micromechanical components. MEMS devices can be batch processed at low cost and are compatible with standard microelectronic devices, so spectroscopy, shape measurement, environmental sensing, refractive index measurement (or material recognition) , And various other sensor applications. In addition, since the MEMS device is small in size, it can be easily integrated into a portable device or a handheld device.