Micro-optical bench device with highly-controlled optical surfaces

Abstract:

Microelectromechanical systems (MEMS) refers to the integration of mechanical elements, sensors, actuators, and electrons on a common silicon substrate by microfabrication technology. For example, microelectronics are typically manufactured using integrated circuit (IC) processes, while micro-mechanical components are selectively etched away from portions of silicon wafers or interconnected to add new structural layers. Manufactured using certain microfabrication processes to form mechanical and electromechanical components. Due to their low cost, batch processing capability, and compatibility with standard microelectronics, MEMS devices provide spectroscopy, profilometry, environmental sensing, refractometry (or texture perception), and some other It is an attractive candidate for use in sensor applications. Also, the small size of MEMS devices facilitates incorporating such MEMS devices into mobile and handheld devices.