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INTEGRATED SPECTRAL UNIT

Abstract:

Aspects of the disclosure relate to an integrated spectral unit including a micro-electro-mechanical systems (MEMS) interferometer fabricated within a first substrate and a light redirecting structure integrated on a second substrate, where the second substrate is coupled to the first substrate. The light redirecting structure includes at least one mirror for receiving an input light beam propagating in an out-of-plane direction with respect to the first substrate and redirecting the input light beam to an in-plane direction with respect to the first substrate towards the MEMS interferometer.

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US20170363469

united states
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inventor: 
Yasser M. Sabry, Diaa Abdel Maged Khalil, Mostafa Medhat, Hisham Haddara, Bassam Saadany, Khaled Hassan
current assignee: 
SI Ware Systems SAE SI Ware Systems Inc
Status: 
Allowed
Status Date: 
May 10, 2018
domain: 
SI Ware Systems SAE SI Ware Systems Inc
worldwide applications: 
2015 . us us . 2026 . kr au ca wo es ep cn mx jp . 2017 . us us 2018 . il

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