INTEGRATED SPECTRAL UNIT

Abstract:

This application claims priority and interests in provisional application Nos. 62 / 350,486 filed with the United States Patent and Trademark Office on June 15, 2016. The entire contents are incorporated herein by reference as if they were fully described below for all applicable purposes. The techniques described below relate to integrated interferometric devices for interference measurement and spectral analysis, especially to integrated microelectromechanical system (MEMS) based interferometric devices.