ULTRA WIDE ANGLE MEMS SCANNER ARCHITECTURE

Abstract:

An optical microscanner achieves wide rotation angles utilizing a curved reflector. The optical microscanner includes a moveable mirror for receiving an incident beam and reflecting the incident beam to produce a reflected beam and a Micro Electro-Mechanical System (MEMS) actuator that causes a linear displacement of the moveable mirror. The curved reflector produces an angular rotation of the reflected beam based on the linear displacement of the moveable mirror.