INTEGRATED MONOLITHIC OPTICAL BENCH CONTAINING 3-D CURVED OPTICAL ELEMENTS AND METHODS OF ITS FABRICATION

Abstract:

The present invention relates generally to optical bench systems, and more particularly to the fabrication of monolithic optical bench systems microfabricated on a substrate.

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JP 2014-537301

united states

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inventor:

ヤセルエムサブリィヤセルエムサブリィタリックイーブルイナタリックイーブルイナバサムエーサダニイバサムエーサダニイディアエーエムカリルディアエーエムカリル

current assignee:

Si Ware Systems SI Ware Systems Inc

Status:

Granted

Status Date:

December 7, 2016

domain:

Si Ware Systems SI Ware Systems Inc

worldwide applications:

2015 . us us . 2026 . kr au ca wo es ep cn mx jp . 2017 . us us 2018 . il

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